Nonlinear modeling and analysis of mems-based diaphragm devices

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Nonlinear modeling and analysis of mems-based diaphragm devices

Bibliographic Details
Main Author:	Faris, Waleed Fekry
Format:	Book Chapter
Language:	English
Published:	IIUM Press 2009
Subjects:	L Education (General) TA Engineering (General). Civil engineering (General)
Online Access:	http://irep.iium.edu.my/7090/ http://irep.iium.edu.my/7090/1/Nonlinear_and_Analysis_of_Mems-Based_Diaphragm_Devices.pdf

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