Nonlinear modeling and analysis of mems-based diaphragm devices
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| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2009
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| Online Access: | http://irep.iium.edu.my/7090/ http://irep.iium.edu.my/7090/1/Nonlinear_and_Analysis_of_Mems-Based_Diaphragm_Devices.pdf |