Design and optimization of a MEMS quartz mass sensor array for biosensing

QR Code

Design and optimization of a MEMS quartz mass sensor array for biosensing

Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...

Full description

Bibliographic Details
Main Authors:	Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Md Ralib, Aliza Aini, Ab Rahim, Rosminazuin, Khan, Sheroz, Guines, Cyril, Chatras, Matthieu, Pothier, Arnaud
Format:	Proceeding Paper
Language:	English English
Published:	Institute of Electrical and Electronics Engineers Inc. 2018
Subjects:	TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf

Similar Items

Verification of quartz crystal microbalance array using vector network analyzer and openQCM
by: Zainuddin, Ahmad Anwar, et al.
Published: (2018)

Simulation of MEMs piezoelectric energy harvester
by: Md Ralib, Aliza Aini, et al.
Published: (2010)

A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2017)

Optical-resonator-based biosensing systems: current status and future prospects
by: Nordin, Anis Nurashikin
Published: (2016)

Development of integrated electrochemical-quartz crystal microbalance biosensor arrays: towards ultrasensitive, multiplexed and rapid point-of-care dengue detection
by: Zainuddin, Ahmad Anwar, et al.
Published: (2019)

Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2013)

Investigation on the mass sensitivity of quartz crystal microbalance gas sensor using finite element simulation
by: Md Ralib, Aliza Aini, et al.
Published: (2019)

Design of two-stage CMOS amplifier for quartz crystal resonator
by: Mohd Taufik, Muhammad Syamsi, et al.
Published: (2013)

Design and analysis of a boosted pierce oscillator using MEMS SAW resonators
by: Md Hamzah, Mohd Haidar, et al.
Published: (2018)

Design and simulation of 10 MHz MEMS oscillator
by: Taufik, Mohamad Syamsi, et al.
Published: (2014)

RF CMOS-MEMS cantilever resonator
by: Zainuddin, Ahmad Anwar, et al.
Published: (2013)

Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2015)

Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
by: Zainuddin, Ahmad Anwar, et al.
Published: (2013)

Gm/ID approach for low power sustaining amplifier circuit for GHz range MEMS SAW oscillator
by: Kamarudin, Norlizawati, et al.
Published: (2019)

Design and optimization of alLow-voltage shunt capacitive RF-MEMS switch
by: Ma, Li Ya, et al.
Published: (2014)

Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
by: Ma, Li Ya, et al.
Published: (2013)

Design, optimization and simulation of a low‑voltage shunt capacitive RF‑MEMS switch
by: Ma, Li Ya, et al.
Published: (2015)

Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch
by: Ma, Li Ya, et al.
Published: (2016)

Design and simulation of two-stage CMOS amplifier for MEMS resonator
by: Mohd Taufik, Muhammad Syamsi, et al.
Published: (2013)

Low power and high voltage swing cascode Pierce oscillator for MEMS SAW resonators
by: Md Hamzah, Mohd Haidar, et al.
Published: (2016)

Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator
by: Karim, Jamilah, et al.
Published: (2015)

A novel design of low-voltage low-loss K-band RF-MEMS capacitive switch
by: Ma, Li-Ya, et al.
Published: (2018)

Acoustic wave based MEMS devices for biosensing applications
by: Voiculescu, Ioana, et al.
Published: (2012)

Tunable bandpass filter using RF MEMS switches
by: Alam, A. H. M. Zahirul, et al.
Published: (2009)

Silicon compatible acoustic wave resonators: design, fabrication and performance
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2013)

Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2013)

Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2015)

Optimization of printing techniques for electrochemical biosensors
by: Zainuddin, Ahmad Anwar, et al.
Published: (2017)

A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch
by: Ma, Li Ya, et al.
Published: (2018)

Design and hardware implementation of conditioning circuit for accurate reading from transducers with nonlinear responses
by: Hasan, Khairul, et al.
Published: (2011)

Acquisition of a very low voltage and a low frequency biomedical signal- frequency selective filter design
by: Shobaki, Mohammed M., et al.
Published: (2014)

Modeling and development of radio frequency planar interdigital electrode sensors
by: Yunos, Muhammad Farhan Affendi, et al.
Published: (2019)

Sensor and sensor response-issues and interfacing
by: Ahmmad, Syed Masrur, et al.
Published: (2011)

Design an ultra-wideband modified wilkinson power divider fed-by balanced antipodal vivaldi antenna array for imaging applications
by: Shaikh, Faraz Ahmed, et al.
Published: (2020)

Piezoelectric characteristics of CMOS compatible AIN SAW resonators
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

Inductive loops for sensing position as signature signals
by: Larbani, Sofiane, et al.
Published: (2013)

Design and simulation of Clamped-Clamped and Clamped-Free resonators
by: Zainuddin, Ahmad Anwar, et al.
Published: (2013)

Influence of growth duration to the Zinc Oxide (ZnO) nanorods on single-mode silica fiber
by: Idris, N. F., et al.
Published: (2018)