Design and optimization of a MEMS quartz mass sensor array for biosensing
Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...
| Main Authors: | , , , , , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2018
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf |