Design and optimization of a MEMS quartz mass sensor array for biosensing
Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design,...
| Main Authors: | , , , , , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2018
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf |
| _version_ | 1848786730211082240 |
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| author | Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud |
| author_facet | Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud |
| author_sort | Zainuddin, Ahmad Anwar |
| building | IIUM Repository |
| collection | Online Access |
| description | Most commercial quartz crystal microbalance
(QCM) sensors are fabricated as a single AT quartz crystal
device and are used for biosensor applications. This limits the
sensor’s ability to perform detection of multiple targets at a
single time. To overcome this we propose in this work, the design,
optimization and simulation of a MEMS quartz mass (QCM)
sensor array. A circular mass sensor placed in an array of four
sensors with working electrode radius, r = 100ȝm and centre to
centre distance between electrodes, s=2.5mm was designed. Based
on COMSOL simulations, resonance frequency of 10.40MHz and
mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained.
Simulations indicate the best placement of the quadruple MEMS
sensors in an array such that their signals do not interfere with
each other. Low degradation of resonance frequency up to 40
kHz was observed based on simulation results. |
| first_indexed | 2025-11-14T17:13:41Z |
| format | Proceeding Paper |
| id | iium-67267 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T17:13:41Z |
| publishDate | 2018 |
| publisher | Institute of Electrical and Electronics Engineers Inc. |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-672672018-10-31T08:33:45Z http://irep.iium.edu.my/67267/ Design and optimization of a MEMS quartz mass sensor array for biosensing Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Most commercial quartz crystal microbalance (QCM) sensors are fabricated as a single AT quartz crystal device and are used for biosensor applications. This limits the sensor’s ability to perform detection of multiple targets at a single time. To overcome this we propose in this work, the design, optimization and simulation of a MEMS quartz mass (QCM) sensor array. A circular mass sensor placed in an array of four sensors with working electrode radius, r = 100ȝm and centre to centre distance between electrodes, s=2.5mm was designed. Based on COMSOL simulations, resonance frequency of 10.40MHz and mass sensitivity of 0.223 Hz.cm2.ng-1 in liquids was obtained. Simulations indicate the best placement of the quadruple MEMS sensors in an array such that their signals do not interfere with each other. Low degradation of resonance frequency up to 40 kHz was observed based on simulation results. Institute of Electrical and Electronics Engineers Inc. 2018-03-09 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf application/pdf en http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin and Md Ralib, Aliza Aini and Ab Rahim, Rosminazuin and Khan, Sheroz and Guines, Cyril and Chatras, Matthieu and Pothier, Arnaud (2018) Design and optimization of a MEMS quartz mass sensor array for biosensing. In: 4th IEEE International Conference on Smart Instrumentation, Measurement and Applications, ICSIMA 2017, 28 - 30 November 2017, Putrajaya. https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8311996 10.1109/ICSIMA.2017.8311996 |
| spellingShingle | TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Md Ralib, Aliza Aini Ab Rahim, Rosminazuin Khan, Sheroz Guines, Cyril Chatras, Matthieu Pothier, Arnaud Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title | Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title_full | Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title_fullStr | Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title_full_unstemmed | Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title_short | Design and optimization of a MEMS quartz mass sensor array for biosensing |
| title_sort | design and optimization of a mems quartz mass sensor array for biosensing |
| topic | TA168 Systems engineering TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/ http://irep.iium.edu.my/67267/1/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_complete.pdf http://irep.iium.edu.my/67267/8/67267_Design%20and%20optimization%20of%20a%20MEMS%20quartz%20_scopus.pdf |