Two sensor based H-infinity control of a piezoelectric tube scanner
The performance of a feedback-controlled piezoelectric tube scanner is limited by its inherent nonlinear properties such as hysteresis and creep, its mechanical resonance modes and its displacement sensor bandwidth and associated noise properties. Capacitive sensors have emerged as the displacement...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
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2008
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| Online Access: | http://irep.iium.edu.my/5307/ http://irep.iium.edu.my/5307/1/Two_Sensor_Based_H-Infinity_Control_of_a_Piezoelectric_Tube_Scanner.pdf |
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| author | Mahmood, Iskandar Al-Thani Liu, Kexiu Moheimani, S. O. Reza |
| author_facet | Mahmood, Iskandar Al-Thani Liu, Kexiu Moheimani, S. O. Reza |
| author_sort | Mahmood, Iskandar Al-Thani |
| building | IIUM Repository |
| collection | Online Access |
| description | The performance of a feedback-controlled piezoelectric tube scanner is limited by its inherent nonlinear properties such as hysteresis and creep, its mechanical resonance modes and its displacement sensor bandwidth and associated noise properties. Capacitive sensors have emerged as the displacement sensor of choice in piezoelectric tube scanners. Resolution of a capacitive sensor is largely determined by its bandwidth and noise density which is typically in the order of 20 pm/root Hz for a +/-100 micrometer range. Consequently, to achieve sub-nanometer resolution, the sensors bandwidth needs to be made small. Achieving satisfactory tracking performance using a low-bandwidth displacement sensor is a challenging task. To improve the bandwidth, the piezoelectric strain voltage induced in the electrode opposite to the actuating electrode is used as a secondary measurement. A two-sensor-based H-infinity controller is designed and implemented on a prototype piezoelectric tube nanopositioning system. The tube is driven by a charge amplifier to reduce the hysteresis. Experimental results demonstrate a significant increase in the tracking bandwidth due to the use of the additional sensor. |
| first_indexed | 2025-11-14T14:30:43Z |
| format | Proceeding Paper |
| id | iium-5307 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:30:43Z |
| publishDate | 2008 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-53072012-06-11T05:54:56Z http://irep.iium.edu.my/5307/ Two sensor based H-infinity control of a piezoelectric tube scanner Mahmood, Iskandar Al-Thani Liu, Kexiu Moheimani, S. O. Reza Q Science (General) TJ212 Control engineering The performance of a feedback-controlled piezoelectric tube scanner is limited by its inherent nonlinear properties such as hysteresis and creep, its mechanical resonance modes and its displacement sensor bandwidth and associated noise properties. Capacitive sensors have emerged as the displacement sensor of choice in piezoelectric tube scanners. Resolution of a capacitive sensor is largely determined by its bandwidth and noise density which is typically in the order of 20 pm/root Hz for a +/-100 micrometer range. Consequently, to achieve sub-nanometer resolution, the sensors bandwidth needs to be made small. Achieving satisfactory tracking performance using a low-bandwidth displacement sensor is a challenging task. To improve the bandwidth, the piezoelectric strain voltage induced in the electrode opposite to the actuating electrode is used as a secondary measurement. A two-sensor-based H-infinity controller is designed and implemented on a prototype piezoelectric tube nanopositioning system. The tube is driven by a charge amplifier to reduce the hysteresis. Experimental results demonstrate a significant increase in the tracking bandwidth due to the use of the additional sensor. 2008-07 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/5307/1/Two_Sensor_Based_H-Infinity_Control_of_a_Piezoelectric_Tube_Scanner.pdf Mahmood, Iskandar Al-Thani and Liu, Kexiu and Moheimani, S. O. Reza (2008) Two sensor based H-infinity control of a piezoelectric tube scanner. In: 17th IFAC World Congress, 2008 , 6-11 July 2008, Seoul, Korea. http://www.ifac-papersonline.net/Detailed/37093.html |
| spellingShingle | Q Science (General) TJ212 Control engineering Mahmood, Iskandar Al-Thani Liu, Kexiu Moheimani, S. O. Reza Two sensor based H-infinity control of a piezoelectric tube scanner |
| title | Two sensor based H-infinity control of a piezoelectric tube scanner |
| title_full | Two sensor based H-infinity control of a piezoelectric tube scanner |
| title_fullStr | Two sensor based H-infinity control of a piezoelectric tube scanner |
| title_full_unstemmed | Two sensor based H-infinity control of a piezoelectric tube scanner |
| title_short | Two sensor based H-infinity control of a piezoelectric tube scanner |
| title_sort | two sensor based h-infinity control of a piezoelectric tube scanner |
| topic | Q Science (General) TJ212 Control engineering |
| url | http://irep.iium.edu.my/5307/ http://irep.iium.edu.my/5307/ http://irep.iium.edu.my/5307/1/Two_Sensor_Based_H-Infinity_Control_of_a_Piezoelectric_Tube_Scanner.pdf |