Fabrication of dual- and single-layer piezoresistive microcantilever sensor

QR Code

Fabrication of dual- and single-layer piezoresistive microcantilever sensor

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and s...

Full description

Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin
Format:	Article
Language:	English English
Published:	Asian Research Publishing Network (ARPN) 2015
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/50730/ http://irep.iium.edu.my/50730/1/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor.pdf http://irep.iium.edu.my/50730/2/50730_Fabrication_of_dual-and_single-layer_piezoresistive_microcantilever_sensor_SCOPUS.pdf

Similar Items

Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching
by: Ab Rahim, Rosminazuin, et al.
Published: (2014)

Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
by: Ab Rahim, Rosminazuin, et al.
Published: (2013)

Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
by: Zakaria, Mohd Hazrul, et al.
Published: (2012)

Analysis of electrical responses of MEMS piezoresistive microcantilever
by: Ab Rahim, Rosminazuin, et al.
Published: (2014)

Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Induced mass change technique for glucose detection in microcantilever-based sensors
by: Mohd Nor, Mardhiah, et al.
Published: (2012)

Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
by: Nina Korlina Madzhi,, et al.
Published: (2011)

Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
by: Madzhi, Nina Korlina
Published: (2012)

SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
by: Lee, Kok Siong
Published: (2011)

ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon
by: Ab Rahim, Rosminazuin, et al.
Published: (2013)

An alternative polymeric protection mask for bulk KOH etching of silicon
by: Ab Rahim, Rosminazuin, et al.
Published: (2012)

Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
by: Jumril Yunas,, et al.
Published: (2014)

Fabrication and characterization of carbon nanotubes/polydimethylsiloxane nanocomposite for low piezoresistive pressure sensor
by: Azhari, Saman
Published: (2016)

Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor
by: Yunas, Jumril, et al.
Published: (2014)

Design analysis of single layer coupled coils
by: Yunas, Jumril, et al.
Published: (2010)

Investigation of piezoresistive sensor for robotic gripping operations
by: Al-Shanoon, Abdulrahman Abdulkareem Sattoori, et al.
Published: (2015)

Sensitivity of piezoresistive pressure sensor with inner diaphragm
by: Chua, Kean Hong, et al.
Published: (2017)

Piezoresistive Elastomer Sensor for Electronic Skin Application
by: Chong, Yung Sin
Published: (2016)

Design and fabrication of crankcase for single cylinder 2-strokes engine
by: Mohd Shukri, Mai
Published: (2007)

Design And Fabrication Of Flexible Strain Sensor For Food Packaging
by: Abdul Aziz, Siti Nuha Majiddah
Published: (2022)

Fabrication of piezoresistive based pressure sensor via purified and functionalized CNTs/PDMS nanocomposite: toward development of haptic sensors \
by: Azhari, Saman, et al.
Published: (2017)

Modelling and fabrication of cylinder head for single cylinder two stroke engine
by: Abdul Hadi, Abd Majid
Published: (2007)

Controlling piezoresistance in single molecules through the isomerisation of bullvalenes
by: Reimers, J.R., et al.
Published: (2023)

Modelling and fabrication of crankcase for single cylinder for 100 CC four-stroke engine
by: Mohd Noor, Mustafa
Published: (2007)

Design and fabrication of a single cylinder diesel engine test platform and it's experimental equipment
by: Auji, Samsudin
Published: (2012)

Design and fabrication of display unit for exploded components of single cylinder 4 stroke engine
by: Mohamad Faza Firdaus, Mohd Rashid
Published: (2012)

A sensitivity study of piezoresistive pressure sensor for robotic hand
by: Almassri, Ahmed M. M., et al.
Published: (2013)

Dimension Optimization of a MEMS LC Pressure Sensor
by: Mohsen, Nabipoor, et al.
Published: (2008)

Study on Machinability of Laser Sintered Materials Fabricated By Layered Manufacturing System: Influence of Different Hardness of Sintered Materials
by: Mohd Sanusi, Abdul Aziz, et al.
Published: (2012)

Minor Construction Measures That Influences Vibration In Concrete Floors From Single And Dual Frequency Components
by: Sinin, Hamdan, et al.
Published: (2015)

Robust and reliable dual the classification system with error compensation module
by: Ahmad Nasiruddin, Ab Razak
Published: (2014)

Hydrogen enhanced cracking studies on Fe-3wt%Si single and bi-crystal microcantilevers
by: Hajilou, T., et al.
Published: (2017)

GaAs PHEMT single-ended mixers for 28 GHz applications
by: Rahman, Nuriha Abd, et al.
Published: (2004)

Fabrication and characterization of supercapacitor with activated carbon electrode and NaOH electrolyte
by: Ab Rahim, Abdul Hakim, et al.
Published: (2018)

The Use of Real-Time Monitoring System Utilizing Single Fibre Bragg Grating Sensor for Composite Plate under Static Loading
by: Vorathin, E., et al.
Published: (2016)

Dual axis solar tracker study
by: Lim, Zi Chao
Published: (2010)

Low cost piezoresistive pressure sensor matrix for pressure ulcer prevention and management
by: Fajingbesi, Fawwaz Eniola, et al.
Published: (2020)

Investigation on developing of a piezoresistive pressure sensor for foot plantar measurement system
by: Mohamad Rashidi, Fairuz Rizal, et al.
Published: (2015)

Design and fabrication technique of thick-film circuits
by: Wagiran, Rahman, et al.
Published: (1990)