ProTEK PSB coating as an alternative polymeric protection
mask for KOH bulk etching of silicon

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ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a signiﬁcant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating which serves as an alternative to the conventional silicon...

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Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sugandi, Gandi
Format:	Article
Language:	English
Published:	Springer 2013
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/30323/ http://irep.iium.edu.my/30323/1/Microsystem_Technologies_published_version_APRIL_2013.pdf

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