Influences of additives on copper film quality and gap filling capability of plating process
| Main Authors: | , |
|---|---|
| Format: | Book Chapter |
| Language: | English |
| Published: |
IIUM Press
2011
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/19353/ http://irep.iium.edu.my/19353/1/chp6.pdf |
| _version_ | 1848778364927606784 |
|---|---|
| author | Mridha, Shahjahan Law, Shao Beng |
| author_facet | Mridha, Shahjahan Law, Shao Beng |
| author_sort | Mridha, Shahjahan |
| building | IIUM Repository |
| collection | Online Access |
| first_indexed | 2025-11-14T15:00:43Z |
| format | Book Chapter |
| id | iium-19353 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:00:43Z |
| publishDate | 2011 |
| publisher | IIUM Press |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-193532012-09-05T00:19:04Z http://irep.iium.edu.my/19353/ Influences of additives on copper film quality and gap filling capability of plating process Mridha, Shahjahan Law, Shao Beng TJ Mechanical engineering and machinery IIUM Press 2011 Book Chapter PeerReviewed application/pdf en http://irep.iium.edu.my/19353/1/chp6.pdf Mridha, Shahjahan and Law, Shao Beng (2011) Influences of additives on copper film quality and gap filling capability of plating process. In: Contemporary metallic materials. IIUM Press, Kuala Lumpur, pp. 34-40. ISBN 9789674181642 http://rms.research.iium.edu.my/bookstore/default.aspx |
| spellingShingle | TJ Mechanical engineering and machinery Mridha, Shahjahan Law, Shao Beng Influences of additives on copper film quality and gap filling capability of plating process |
| title | Influences of additives on copper film quality and gap filling capability of plating process |
| title_full | Influences of additives on copper film quality and gap filling capability of plating process |
| title_fullStr | Influences of additives on copper film quality and gap filling capability of plating process |
| title_full_unstemmed | Influences of additives on copper film quality and gap filling capability of plating process |
| title_short | Influences of additives on copper film quality and gap filling capability of plating process |
| title_sort | influences of additives on copper film quality and gap filling capability of plating process |
| topic | TJ Mechanical engineering and machinery |
| url | http://irep.iium.edu.my/19353/ http://irep.iium.edu.my/19353/ http://irep.iium.edu.my/19353/1/chp6.pdf |