Targeted defect analysis in VCSEL oxide windows using 3D slice and view

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Targeted defect analysis in VCSEL oxide windows using 3D slice and view

We report on high resolution analysis of vertical cavity surface emitting lasers (VCSELs) to detect and assess defects in sub-surface layers. We employ a focussed ion beam scanning electron microscope (FIB-SEM) to sputter and image successive cross sections (slice and view technique) in order to pro...

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Bibliographic Details
Main Authors:	Sun, Xiao, Rickard, William, Ironside, Charlie, Kostakis, I., Missous, M., Powell, D., Anjomshoaa, A., Meredith, W.
Format:	Journal Article
Language:	English
Published:	IOP PUBLISHING LTD 2021
Subjects:	Science & Technology Technology Physical Sciences Engineering, Electrical & Electronic Materials Science, Multidisciplinary Physics, Condensed Matter Engineering Materials Science Physics vertical cavity surface emitting lasers focussed ion beam slice and view defect analysis
Online Access:	http://hdl.handle.net/20.500.11937/86292

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