Targeted defect analysis in VCSEL oxide windows using 3D slice and view

Targeted defect analysis in VCSEL oxide windows using 3D slice and view

We report on high resolution analysis of vertical cavity surface emitting lasers (VCSELs) to detect and assess defects in sub-surface layers. We employ a focussed ion beam scanning electron microscope (FIB-SEM) to sputter and image successive cross sections (slice and view technique) in order to pro...

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Bibliographic Details
Main Authors: Sun, Xiao, Rickard, William, Ironside, Charlie, Kostakis, I., Missous, M., Powell, D., Anjomshoaa, A., Meredith, W.
Format: Journal Article
Language:English
Published: IOP PUBLISHING LTD 2021
Subjects:
Science & Technology
Technology
Physical Sciences
Engineering, Electrical & Electronic
Materials Science, Multidisciplinary
Physics, Condensed Matter
Engineering
Materials Science
Physics
vertical cavity surface emitting lasers
focussed ion beam
slice and view
defect analysis
Online Access:http://hdl.handle.net/20.500.11937/86292

Internet

http://hdl.handle.net/20.500.11937/86292

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