APA (7th ed.) Citation

Sun, X., Keating, A., Parish, G., & Faraone, L. (2014). Stress control of porous silicon film for microelectromechanical systems. IEEE.

Chicago Style (17th ed.) Citation

Sun, Xiao, Adrian Keating, Giacinta Parish, and L. Faraone. Stress Control of Porous Silicon Film for Microelectromechanical Systems. IEEE, 2014.

MLA (9th ed.) Citation

Sun, Xiao, et al. Stress Control of Porous Silicon Film for Microelectromechanical Systems. IEEE, 2014.