Released micromachined beams utilizing laterally uniform porosity porous silicon

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Released micromachined beams utilizing laterally uniform porosity porous silicon

© 2014, Sun et al.; licensee Springer. Abstract: Suspended micromachined porous silicon beams with laterally uniform porosity are reported, which have been fabricated using standard photolithography processes designed for compatibility with complementary metal-oxide-semiconductor (CMOS) processe...

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Bibliographic Details
Main Authors:	Sun, Xiao, Keating, Adrian, Parish, Giacinta
Format:	Journal Article
Published:	Springer New York 2014
Online Access:	http://hdl.handle.net/20.500.11937/79814

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