Released micromachined beams utilizing laterally uniform porosity porous silicon
© 2014, Sun et al.; licensee Springer. Abstract: Suspended micromachined porous silicon beams with laterally uniform porosity are reported, which have been fabricated using standard photolithography processes designed for compatibility with complementary metal-oxide-semiconductor (CMOS) processe...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Springer New York
2014
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| Online Access: | http://hdl.handle.net/20.500.11937/79814 |