Stress control of porous silicon films for microelectromechanical systems

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Stress control of porous silicon films for microelectromechanical systems

© 2015 Elsevier Inc. All rights reserved. Control of stress in porous silicon (PS) through porosity changes was studied using X-ray diffraction rocking curve measurements. The effect of thermal annealing on the stress was also investigated with both X-ray diffraction and radius of curvature meas...

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Bibliographic Details
Main Authors:	Sun, Xiao, Keating, Adrian, Parish, Giacinta
Format:	Journal Article
Published:	Elsevier 2015
Online Access:	http://hdl.handle.net/20.500.11937/79813

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