APA (7th ed.) Citation

Sun, X., Keating, A., & Parish, G. (2015). Stress control of porous silicon films for microelectromechanical systems. Elsevier.

Chicago Style (17th ed.) Citation

Sun, Xiao, Adrian Keating, and Giacinta Parish. Stress Control of Porous Silicon Films for Microelectromechanical Systems. Elsevier, 2015.

MLA (9th ed.) Citation

Sun, Xiao, et al. Stress Control of Porous Silicon Films for Microelectromechanical Systems. Elsevier, 2015.