Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control

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Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control

All-mesoporous silicon microstructures were released with standard micromachining processes. The extremely high porosity of the films allows control of the mechanical properties as well as providing a platform material for devices with extremely large surface area. To pattern and release devices fro...

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Bibliographic Details
Main Authors:	Sun, Xiao, Parish, Giacinta, Keating, Adrian
Format:	Journal Article
Published:	IOP Publishing 2017
Online Access:	http://hdl.handle.net/20.500.11937/79812

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