Fabrication of uniform porosity, all-porous-silicon microstructures and stress/stress gradient control
All-mesoporous silicon microstructures were released with standard micromachining processes. The extremely high porosity of the films allows control of the mechanical properties as well as providing a platform material for devices with extremely large surface area. To pattern and release devices fro...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
IOP Publishing
2017
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| Online Access: | http://hdl.handle.net/20.500.11937/79812 |