Micromachined microbeams made from porous silicon for dynamic and static mode sensing

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Micromachined microbeams made from porous silicon for dynamic and static mode sensing

Through a controlled variation of the applied current during porous silicon formation, newly developedprocesses enable previously unattainable structural integrity of all-mesoporous silicon microelectrome-chanical systems (MEMS) structures. Such structures are desirable for applications such as sens...

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Bibliographic Details
Main Authors:	Sun, Xiao, Parish, Giacinta, Keating, Adrian
Format:	Journal Article
Published:	Elsevier 2018
Online Access:	http://purl.org/au-research/grants/arc/DP170104266 http://hdl.handle.net/20.500.11937/79811

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