Micromachined microbeams made from porous silicon for dynamic and static mode sensing
Through a controlled variation of the applied current during porous silicon formation, newly developedprocesses enable previously unattainable structural integrity of all-mesoporous silicon microelectrome-chanical systems (MEMS) structures. Such structures are desirable for applications such as sens...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Elsevier
2018
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| Online Access: | http://purl.org/au-research/grants/arc/DP170104266 http://hdl.handle.net/20.500.11937/79811 |