Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

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Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

The selective formation of either oxidized or carbonized features into 2.5 µm thick porous silicon (PS) films using laser writing at a wavelength of 405 nm is demonstrated. Oxidized features are formed in air while carbonized features are achieved during the flow of propane at 600 sccm. Voids wh...

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Bibliographic Details
Main Authors:	Keating, Adrian, Sun, Xiao
Format:	Journal Article
Published:	Wiley Online Library 2019
Online Access:	http://purl.org/au-research/grants/arc/DP170104266 http://hdl.handle.net/20.500.11937/79810

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