Selective Oxidation and Carbonization by Laser Writing into Porous Silicon
The selective formation of either oxidized or carbonized features into 2.5 µm thick porous silicon (PS) films using laser writing at a wavelength of 405 nm is demonstrated. Oxidized features are formed in air while carbonized features are achieved during the flow of propane at 600 sccm. Voids wh...
| Main Authors: | , |
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| Format: | Journal Article |
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Wiley Online Library
2019
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| Online Access: | http://purl.org/au-research/grants/arc/DP170104266 http://hdl.handle.net/20.500.11937/79810 |