Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows
Copyright © Microscopy Society of America 2020. Atom probe tomography (APT) is used to quantify atomic-scale elemental and isotopic compositional variations within a very small volume of material (typically <0.01 μm3). The small analytical volume ideally contains specific compositional or microst...
| Main Authors: | , , , , , , , , |
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| Format: | Journal Article |
| Language: | English |
| Published: |
2020
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| Subjects: | |
| Online Access: | http://purl.org/au-research/grants/arc/DE190101307 http://hdl.handle.net/20.500.11937/79363 |
| _version_ | 1848764038215892992 |
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| author | Rickard, William Reddy, Steven Saxey, David Fougerouse, Denis Timms, Nick Daly, L. Peterman, E. Cavosie, Aaron Jourdan, Fred |
| author_facet | Rickard, William Reddy, Steven Saxey, David Fougerouse, Denis Timms, Nick Daly, L. Peterman, E. Cavosie, Aaron Jourdan, Fred |
| author_sort | Rickard, William |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | Copyright © Microscopy Society of America 2020. Atom probe tomography (APT) is used to quantify atomic-scale elemental and isotopic compositional variations within a very small volume of material (typically <0.01 μm3). The small analytical volume ideally contains specific compositional or microstructural targets that can be placed within the context of the previously characterized surface in order to facilitate a correct interpretation of APT data. In this regard, careful targeting and preparation are paramount to ensure that the desired target, which is often smaller than 100 nm, is optimally located within the APT specimen. Needle-shaped specimens required for atom probe analysis are commonly prepared using a focused ion beam scanning electron microscope (FIB-SEM). Here, we utilize FIB-SEM-based time-of-flight secondary ion mass spectrometry (ToF-SIMS) to illustrate a novel approach to targeting <100 nm compositional and isotopic variations that can be used for targeting regions of interest for subsequent lift-out and APT analysis. We present a new method for high-spatial resolution targeting of small features that involves using FIB-SEM-based electron deposition of platinum "buttons" prior to standard lift-out and sharpening procedures for atom probe specimen manufacture. In combination, FIB-ToF-SIMS analysis and application of the "button" method ensure that even the smallest APT targets can be successfully captured in extracted needles. |
| first_indexed | 2025-11-14T11:13:00Z |
| format | Journal Article |
| id | curtin-20.500.11937-79363 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| language | eng |
| last_indexed | 2025-11-14T11:13:00Z |
| publishDate | 2020 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-793632022-09-06T03:22:46Z Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows Rickard, William Reddy, Steven Saxey, David Fougerouse, Denis Timms, Nick Daly, L. Peterman, E. Cavosie, Aaron Jourdan, Fred FIB-SEM FIB-ToF-SIMS atom probe tomograpy sample preparation Copyright © Microscopy Society of America 2020. Atom probe tomography (APT) is used to quantify atomic-scale elemental and isotopic compositional variations within a very small volume of material (typically <0.01 μm3). The small analytical volume ideally contains specific compositional or microstructural targets that can be placed within the context of the previously characterized surface in order to facilitate a correct interpretation of APT data. In this regard, careful targeting and preparation are paramount to ensure that the desired target, which is often smaller than 100 nm, is optimally located within the APT specimen. Needle-shaped specimens required for atom probe analysis are commonly prepared using a focused ion beam scanning electron microscope (FIB-SEM). Here, we utilize FIB-SEM-based time-of-flight secondary ion mass spectrometry (ToF-SIMS) to illustrate a novel approach to targeting <100 nm compositional and isotopic variations that can be used for targeting regions of interest for subsequent lift-out and APT analysis. We present a new method for high-spatial resolution targeting of small features that involves using FIB-SEM-based electron deposition of platinum "buttons" prior to standard lift-out and sharpening procedures for atom probe specimen manufacture. In combination, FIB-ToF-SIMS analysis and application of the "button" method ensure that even the smallest APT targets can be successfully captured in extracted needles. 2020 Journal Article http://hdl.handle.net/20.500.11937/79363 10.1017/S1431927620000136 eng http://purl.org/au-research/grants/arc/DE190101307 fulltext |
| spellingShingle | FIB-SEM FIB-ToF-SIMS atom probe tomograpy sample preparation Rickard, William Reddy, Steven Saxey, David Fougerouse, Denis Timms, Nick Daly, L. Peterman, E. Cavosie, Aaron Jourdan, Fred Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title | Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title_full | Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title_fullStr | Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title_full_unstemmed | Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title_short | Novel Applications of FIB-SEM-Based ToF-SIMS in Atom Probe Tomography Workflows |
| title_sort | novel applications of fib-sem-based tof-sims in atom probe tomography workflows |
| topic | FIB-SEM FIB-ToF-SIMS atom probe tomograpy sample preparation |
| url | http://purl.org/au-research/grants/arc/DE190101307 http://hdl.handle.net/20.500.11937/79363 |