A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)

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A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)

Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical properties of magnetron sputtered Ce/Ti oxide thin films on Si (100) wafers with different Ce:Ti ratios are investigated experimenta...

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Bibliographic Details
Main Authors:	Patel, S., Radevski, N., Mondinos, N., Zhao, X., Jack, K., Veder, Jean-Pierre, Zhou, Z., Jiang, Z.
Format:	Journal Article
Published:	Elsevier Science Ltd 2019
Online Access:	http://hdl.handle.net/20.500.11937/74709

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