A mechanical and modelling study of magnetron sputtered cerium-titanium oxide film coatings on Si (100)
Ce/Ti mixed metal oxide thin films have well known optoelectrical properties amongst several other physio-chemical properties. Changes in the structural and mechanical properties of magnetron sputtered Ce/Ti oxide thin films on Si (100) wafers with different Ce:Ti ratios are investigated experimenta...
| Main Authors: | , , , , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier Science Ltd
2019
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| Online Access: | http://hdl.handle.net/20.500.11937/74709 |