Nanoscale elastic-plastic deformation and mechanical properties of 3C-SiC thin film using nanoindentation

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Nanoscale elastic-plastic deformation and mechanical properties of 3C-SiC thin film using nanoindentation

The elastic-plastic deformation of 3C-SiC thin film was investigated by a nanoindenter equipped with the Berkovich tip. Transition from pure elastic to elastic-plastic deformation was evidenced at an approximate load of 0.35 mN, when loading the sample at several peak loads ranging from 0.5 to 5 mN....

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Bibliographic Details
Main Authors:	Nawaz, A., Islam, B., Mao, W., Lu, Chunsheng, Shen, Y.
Format:	Journal Article
Published:	Wiley-Blackwell Publishing, Inc. 2018
Online Access:	http://hdl.handle.net/20.500.11937/73291

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