Nanoscale elastic-plastic deformation and mechanical properties of 3C-SiC thin film using nanoindentation
The elastic-plastic deformation of 3C-SiC thin film was investigated by a nanoindenter equipped with the Berkovich tip. Transition from pure elastic to elastic-plastic deformation was evidenced at an approximate load of 0.35 mN, when loading the sample at several peak loads ranging from 0.5 to 5 mN....
| Main Authors: | , , , , |
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| Format: | Journal Article |
| Published: |
Wiley-Blackwell Publishing, Inc.
2018
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| Online Access: | http://hdl.handle.net/20.500.11937/73291 |