Annealing effects on microstructural, optical, and mechanical properties of sputtered CrN thin film coatings: Experimental studies and finite element modeling

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Annealing effects on microstructural, optical, and mechanical properties of sputtered CrN thin film coatings: Experimental studies and finite element modeling

© 2018 Elsevier B.V. Chromium nitride (CrN) coatings were deposited by magnetron sputtering onto Si(100) substrates. The coatings were then annealed at different temperatures (500–800 °C in steps of 100 °C) in air for 1 h. X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM),...

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Bibliographic Details
Main Authors:	Ibrahim, K., Rahman, M., Zhao, X., Veder, Jean-Pierre, Zhou, Z., Mohammadpour, E., Majeed, R., Nikoloski, A., Jiang, Z.
Format:	Journal Article
Published:	Elsevier B.V. 2018
Online Access:	http://hdl.handle.net/20.500.11937/71917

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