Annealing effects on microstructural, optical, and mechanical properties of sputtered CrN thin film coatings: Experimental studies and finite element modeling
© 2018 Elsevier B.V. Chromium nitride (CrN) coatings were deposited by magnetron sputtering onto Si(100) substrates. The coatings were then annealed at different temperatures (500–800 °C in steps of 100 °C) in air for 1 h. X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM),...
| Main Authors: | , , , , , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier B.V.
2018
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| Online Access: | http://hdl.handle.net/20.500.11937/71917 |