Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films
The grazing incidence diffraction (GID) method in side inclination mode, described by Ma et al. in 2002, of polycrystalline thin-film residual stress was revisited and explained using simple geometric relations. To overcome the issue of decreasing peak intensity of this method, which is induced by t...
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| Format: | Journal Article |
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International Centre for Diffraction Data
2017
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| Online Access: | https://www.cambridge.org/core/journals/powder-diffraction/article/omegaphi-compensated-gid-in-side-inclination-mode-for-measurement-of-residual-stress-in-polycrystalline-thin-films/CC62C6CCBEEFC32B75F3D0DA77E831EE http://hdl.handle.net/20.500.11937/71466 |
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| author | Wang, Xiaodong Van Riessen, Arie |
| author_facet | Wang, Xiaodong Van Riessen, Arie |
| author_sort | Wang, Xiaodong |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | The grazing incidence diffraction (GID) method in side inclination mode, described by Ma et al. in 2002, of polycrystalline thin-film residual stress was revisited and explained using simple geometric relations. To overcome the issue of decreasing peak intensity of this method, which is induced by the decreasing incident angle because of the Eulerian cradle Chi-tilt, an improvement of Omega (ω)–Phi (φ) compensation was devised and applied to a NiFe thin-film sample. The geometry of this improved ω–φ compensated GID method in side inclination mode is detailed in this paper. This improvement guarantees a constant incident angle on the sample surface and a fixed sample illumination volume during measurement. The measured data were analysed using parametric refinement in DIFFRAC.TOPAS v6 software in Launch Mode, and details of the input file (.INP) are explained in this paper. The tensile stress of the NiFe thin-film sample was measured to be 1181 ± 85 MPa using this improved method. |
| first_indexed | 2025-11-14T10:48:20Z |
| format | Journal Article |
| id | curtin-20.500.11937-71466 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T10:48:20Z |
| publishDate | 2017 |
| publisher | International Centre for Diffraction Data |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-714662019-05-09T01:59:52Z Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films Wang, Xiaodong Van Riessen, Arie The grazing incidence diffraction (GID) method in side inclination mode, described by Ma et al. in 2002, of polycrystalline thin-film residual stress was revisited and explained using simple geometric relations. To overcome the issue of decreasing peak intensity of this method, which is induced by the decreasing incident angle because of the Eulerian cradle Chi-tilt, an improvement of Omega (ω)–Phi (φ) compensation was devised and applied to a NiFe thin-film sample. The geometry of this improved ω–φ compensated GID method in side inclination mode is detailed in this paper. This improvement guarantees a constant incident angle on the sample surface and a fixed sample illumination volume during measurement. The measured data were analysed using parametric refinement in DIFFRAC.TOPAS v6 software in Launch Mode, and details of the input file (.INP) are explained in this paper. The tensile stress of the NiFe thin-film sample was measured to be 1181 ± 85 MPa using this improved method. 2017 Journal Article http://hdl.handle.net/20.500.11937/71466 10.1017/S0885715617001117 https://www.cambridge.org/core/journals/powder-diffraction/article/omegaphi-compensated-gid-in-side-inclination-mode-for-measurement-of-residual-stress-in-polycrystalline-thin-films/CC62C6CCBEEFC32B75F3D0DA77E831EE International Centre for Diffraction Data restricted |
| spellingShingle | Wang, Xiaodong Van Riessen, Arie Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title | Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title_full | Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title_fullStr | Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title_full_unstemmed | Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title_short | Omega-Phi compensated GID in side inclination mode for measurement of residual stress in polycrystalline thin films |
| title_sort | omega-phi compensated gid in side inclination mode for measurement of residual stress in polycrystalline thin films |
| url | https://www.cambridge.org/core/journals/powder-diffraction/article/omegaphi-compensated-gid-in-side-inclination-mode-for-measurement-of-residual-stress-in-polycrystalline-thin-films/CC62C6CCBEEFC32B75F3D0DA77E831EE http://hdl.handle.net/20.500.11937/71466 |