Path planning and parameter optimization of uniform removal in active feed polishing

© Society of Photo-Optical Instrumentation Engineers. A high-quality ultrasmooth surface is demanded in short-wave optical systems. However, the existing polishing methods have difficulties meeting the requirement on spherical or aspheric surfaces. As a new kind of small tool polishing method, activ...

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Bibliographic Details
Main Authors: Liu, Jian, Wang, S., Zhang, C., Zhang, L., Chen, H.
Format: Journal Article
Published: The Society of Photo-Optical Instrumentation Engineers 2015
Online Access:http://hdl.handle.net/20.500.11937/71054