Influence of DC magnetron sputtering reaction gas on structural and optical characteristics of Ce-oxide thin films
The influence of the reaction gas composition during the DC magnetron sputtering process on the structural, chemical and optical properties of Ce-oxide thin films was investigated. X-ray diffraction (XRD) studies confirmed that all thin films exhibited a polycrystalline character with cubic fluorite...
| Main Authors: | Miran, H., Jiang, Z., Altarawneh, M., Veder, Jean-Pierre, Zhou, Z., Rahman, M., Jaf, Z., Dlugogorski, B. |
|---|---|
| Format: | Journal Article |
| Published: |
Elsevier Science Ltd
2018
|
| Online Access: | http://hdl.handle.net/20.500.11937/69872 |
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