Influence of DC magnetron sputtering reaction gas on structural and optical characteristics of Ce-oxide thin films
The influence of the reaction gas composition during the DC magnetron sputtering process on the structural, chemical and optical properties of Ce-oxide thin films was investigated. X-ray diffraction (XRD) studies confirmed that all thin films exhibited a polycrystalline character with cubic fluorite...
| Main Authors: | , , , , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier Science Ltd
2018
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| Online Access: | http://hdl.handle.net/20.500.11937/69872 |