Characterisation of the growth of a carbonaceous film on silicon

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Characterisation of the growth of a carbonaceous film on silicon

In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exp...

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Bibliographic Details
Main Authors:	Beardmore, Joshua, Palmer, A., Fabrie, C., Van Leeuwen, K., Sang, R.
Format:	Journal Article
Published:	Elsevier S.A. 2012
Online Access:	http://hdl.handle.net/20.500.11937/66387

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