Characterisation of the growth of a carbonaceous film on silicon
In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exp...
| Main Authors: | , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier S.A.
2012
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| Online Access: | http://hdl.handle.net/20.500.11937/66387 |