Characterisation of the growth of a carbonaceous film on silicon
In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exp...
| Main Authors: | , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier S.A.
2012
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| Online Access: | http://hdl.handle.net/20.500.11937/66387 |
| _version_ | 1848761309526491136 |
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| author | Beardmore, Joshua Palmer, A. Fabrie, C. Van Leeuwen, K. Sang, R. |
| author_facet | Beardmore, Joshua Palmer, A. Fabrie, C. Van Leeuwen, K. Sang, R. |
| author_sort | Beardmore, Joshua |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems. © 2011 Elsevier B.V. All rights reserved. |
| first_indexed | 2025-11-14T10:29:37Z |
| format | Journal Article |
| id | curtin-20.500.11937-66387 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T10:29:37Z |
| publishDate | 2012 |
| publisher | Elsevier S.A. |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-663872018-04-30T02:49:02Z Characterisation of the growth of a carbonaceous film on silicon Beardmore, Joshua Palmer, A. Fabrie, C. Van Leeuwen, K. Sang, R. In this paper we present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems. © 2011 Elsevier B.V. All rights reserved. 2012 Journal Article http://hdl.handle.net/20.500.11937/66387 10.1016/j.tsf.2011.09.073 Elsevier S.A. restricted |
| spellingShingle | Beardmore, Joshua Palmer, A. Fabrie, C. Van Leeuwen, K. Sang, R. Characterisation of the growth of a carbonaceous film on silicon |
| title | Characterisation of the growth of a carbonaceous film on silicon |
| title_full | Characterisation of the growth of a carbonaceous film on silicon |
| title_fullStr | Characterisation of the growth of a carbonaceous film on silicon |
| title_full_unstemmed | Characterisation of the growth of a carbonaceous film on silicon |
| title_short | Characterisation of the growth of a carbonaceous film on silicon |
| title_sort | characterisation of the growth of a carbonaceous film on silicon |
| url | http://hdl.handle.net/20.500.11937/66387 |