Research of composition and photocatalytic property of carbon-doped Ti-O films prepared by R-MS using CO2 gas resource
In this paper, carbon-doped Ti-O films were prepared on silicon wafer and stainless steel by reaction magnetron sputtering using CO 2 as carbon and oxygen source. By changing the ratio of CO 2 /O 2 , a series of films with different composition can be obtained. X-ray photoelectron spectroscopy (XPS)...
| Main Authors: | , , , , |
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| Format: | Journal Article |
| Published: |
Elsevier
2013
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| Online Access: | http://hdl.handle.net/20.500.11937/61146 |