Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites

Controllable low-temperature (500 °C) deposition of SiC–C (3–10 vol.%C) composite ceramic films on Si(100) was achieved using a pulsed dc-magnetron puttering system in a mixture of CH4/Ar, followed by annealing in 600–1000 °C. At annealing temperatures of 800 °C or above, the formation of equiaxed...

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Main Authors: Zhu, Y., Zhou, Z., Lu, Chunsheng, Liao, X., Shen, Y.
Format: Journal Article
Published: American Scientific Publishers 2012
Online Access:http://hdl.handle.net/20.500.11937/5740
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author Zhu, Y.
Zhou, Z.
Lu, Chunsheng
Liao, X.
Shen, Y.
author_facet Zhu, Y.
Zhou, Z.
Lu, Chunsheng
Liao, X.
Shen, Y.
author_sort Zhu, Y.
building Curtin Institutional Repository
collection Online Access
description Controllable low-temperature (500 °C) deposition of SiC–C (3–10 vol.%C) composite ceramic films on Si(100) was achieved using a pulsed dc-magnetron puttering system in a mixture of CH4/Ar, followed by annealing in 600–1000 °C. At annealing temperatures of 800 °C or above, the formation of equiaxed SiC nanocrystals (NCs) was accompanied by near-elongated nano-C (graphite). These SiC NCs are chemically pure, highly stoichiometric, and have typical sizes of 6–24 nm. After further annealing at 1000 °C, SiC NCs were also in the form of regular grains with an average size of ~55 nm, whereas elongated nano-C grains were transformed to graphite nanorods (NRs) with widths of 5–20 nm and lengths of 30–120 nm. The greatly enhanced mechanical properties of SiC–C nanocomposites are attributed to their improved nanostructure comprising of SiC NCs surrounded by nano-C NR matrices. The formation of graphite NRs is also interpreted by an oxide-assisted growth mechanism.
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institution Curtin University Malaysia
institution_category Local University
last_indexed 2025-11-14T06:08:30Z
publishDate 2012
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spelling curtin-20.500.11937-57402017-09-13T16:06:10Z Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites Zhu, Y. Zhou, Z. Lu, Chunsheng Liao, X. Shen, Y. Controllable low-temperature (500 °C) deposition of SiC–C (3–10 vol.%C) composite ceramic films on Si(100) was achieved using a pulsed dc-magnetron puttering system in a mixture of CH4/Ar, followed by annealing in 600–1000 °C. At annealing temperatures of 800 °C or above, the formation of equiaxed SiC nanocrystals (NCs) was accompanied by near-elongated nano-C (graphite). These SiC NCs are chemically pure, highly stoichiometric, and have typical sizes of 6–24 nm. After further annealing at 1000 °C, SiC NCs were also in the form of regular grains with an average size of ~55 nm, whereas elongated nano-C grains were transformed to graphite nanorods (NRs) with widths of 5–20 nm and lengths of 30–120 nm. The greatly enhanced mechanical properties of SiC–C nanocomposites are attributed to their improved nanostructure comprising of SiC NCs surrounded by nano-C NR matrices. The formation of graphite NRs is also interpreted by an oxide-assisted growth mechanism. 2012 Journal Article http://hdl.handle.net/20.500.11937/5740 10.1166/nnl.2012.1329 American Scientific Publishers restricted
spellingShingle Zhu, Y.
Zhou, Z.
Lu, Chunsheng
Liao, X.
Shen, Y.
Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title_full Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title_fullStr Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title_full_unstemmed Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title_short Effect of thermal annealing on nanostructure and shape transition in SiC–C nanocomposites
title_sort effect of thermal annealing on nanostructure and shape transition in sic–c nanocomposites
url http://hdl.handle.net/20.500.11937/5740