Multilevel Computational Analysis of Fluorocarbon Polyatomic Deposition on Diamond
Hyperthermal polyatomic fluorocarbon (FC) deposition upon the diamond (111) surface is simulated and analyzed at several levels of computational theory. Classical molecular dynamics simulations using the reactive empirical bond order (REBO) potential are used to categorize the surface reactions that...
| Main Authors: | , , , , , , |
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| Format: | Journal Article |
| Published: |
American Chemical Society
2010
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| Online Access: | http://hdl.handle.net/20.500.11937/5318 |