The behaviour of arcs in carbon mixed-mode high-power impulse magnetron sputtering

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The behaviour of arcs in carbon mixed-mode high-power impulse magnetron sputtering

Mixed-mode deposition of carbon is an extension of high-power impulse magnetron sputtering in which a short-lived arc is deliberately allowed to ignite on the target surface to increase the ionised fraction of carbon in the deposition flux. Here we investigate the ignition and evolution of these arc...

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Bibliographic Details
Main Authors:	Tucker, Mark, Putman, Kate, Ganesan, R., Lattemann, M., Stueber, M., Ulrich, S., Bilek, M., McKenzie, D., Marks, Nigel
Format:	Journal Article
Published:	IOP Publishing Ltd 2017
Online Access:	http://hdl.handle.net/20.500.11937/52102

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