The behaviour of arcs in carbon mixed-mode high-power impulse magnetron sputtering
Mixed-mode deposition of carbon is an extension of high-power impulse magnetron sputtering in which a short-lived arc is deliberately allowed to ignite on the target surface to increase the ionised fraction of carbon in the deposition flux. Here we investigate the ignition and evolution of these arc...
| Main Authors: | , , , , , , , , |
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| Format: | Journal Article |
| Published: |
IOP Publishing Ltd
2017
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| Online Access: | http://hdl.handle.net/20.500.11937/52102 |