Recessed nanoband electrodes fabricated by focused ion beam milling

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Recessed nanoband electrodes fabricated by focused ion beam milling

This paper describes the fabrication of band electrodes and electrode arrays recessed within nanoscale trenches sculpted in silicon nitride passivation layers by focused ion beam (FIB) milling, thus creating recessed nanoband electrodes. Controllable nanoband dimensions, numbers and inter-band spaci...

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Bibliographic Details
Main Authors:	Lanyon, Y., Arrigan, Damien
Format:	Journal Article
Published:	Elsevier SA 2007
Online Access:	www.sciencedirect.com http://hdl.handle.net/20.500.11937/47056

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