Recessed nanoband electrodes fabricated by focused ion beam milling
This paper describes the fabrication of band electrodes and electrode arrays recessed within nanoscale trenches sculpted in silicon nitride passivation layers by focused ion beam (FIB) milling, thus creating recessed nanoband electrodes. Controllable nanoband dimensions, numbers and inter-band spaci...
| Main Authors: | , |
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| Format: | Journal Article |
| Published: |
Elsevier SA
2007
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| Online Access: | www.sciencedirect.com http://hdl.handle.net/20.500.11937/47056 |