Recessed nanoband electrodes fabricated by focused ion beam milling

This paper describes the fabrication of band electrodes and electrode arrays recessed within nanoscale trenches sculpted in silicon nitride passivation layers by focused ion beam (FIB) milling, thus creating recessed nanoband electrodes. Controllable nanoband dimensions, numbers and inter-band spaci...

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Main Authors: Lanyon, Y., Arrigan, Damien
Format: Journal Article
Published: Elsevier SA 2007
Online Access:www.sciencedirect.com
http://hdl.handle.net/20.500.11937/47056
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author Lanyon, Y.
Arrigan, Damien
author_facet Lanyon, Y.
Arrigan, Damien
author_sort Lanyon, Y.
building Curtin Institutional Repository
collection Online Access
description This paper describes the fabrication of band electrodes and electrode arrays recessed within nanoscale trenches sculpted in silicon nitride passivation layers by focused ion beam (FIB) milling, thus creating recessed nanoband electrodes. Controllable nanoband dimensions, numbers and inter-band spacing have been rapidly created by the direct write approach of the FIB milling technique. Milling of cross-sections through the trenches demonstrated that the trench walls were non-vertical and enabled evaluation of the trench wall angle, ca. 19?. Cyclic voltammetric characterisation using a simple redox probe ion, ferrocene carboxylate in phosphate buffered saline electrolyte solution, demonstrated steady-state voltammetric curves, consistent with multi-dimensional diffusion being the controlling mass transport mechanism under these conditions. The simplicity of the preparation method for these nanoband devices provides scope for their use in sensing applications as well as in fluid transport studies in nanodimensions.
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publishDate 2007
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spelling curtin-20.500.11937-470562017-09-13T14:27:26Z Recessed nanoband electrodes fabricated by focused ion beam milling Lanyon, Y. Arrigan, Damien This paper describes the fabrication of band electrodes and electrode arrays recessed within nanoscale trenches sculpted in silicon nitride passivation layers by focused ion beam (FIB) milling, thus creating recessed nanoband electrodes. Controllable nanoband dimensions, numbers and inter-band spacing have been rapidly created by the direct write approach of the FIB milling technique. Milling of cross-sections through the trenches demonstrated that the trench walls were non-vertical and enabled evaluation of the trench wall angle, ca. 19?. Cyclic voltammetric characterisation using a simple redox probe ion, ferrocene carboxylate in phosphate buffered saline electrolyte solution, demonstrated steady-state voltammetric curves, consistent with multi-dimensional diffusion being the controlling mass transport mechanism under these conditions. The simplicity of the preparation method for these nanoband devices provides scope for their use in sensing applications as well as in fluid transport studies in nanodimensions. 2007 Journal Article http://hdl.handle.net/20.500.11937/47056 10.1016/j.snb.2006.11.029 www.sciencedirect.com Elsevier SA restricted
spellingShingle Lanyon, Y.
Arrigan, Damien
Recessed nanoband electrodes fabricated by focused ion beam milling
title Recessed nanoband electrodes fabricated by focused ion beam milling
title_full Recessed nanoband electrodes fabricated by focused ion beam milling
title_fullStr Recessed nanoband electrodes fabricated by focused ion beam milling
title_full_unstemmed Recessed nanoband electrodes fabricated by focused ion beam milling
title_short Recessed nanoband electrodes fabricated by focused ion beam milling
title_sort recessed nanoband electrodes fabricated by focused ion beam milling
url www.sciencedirect.com
http://hdl.handle.net/20.500.11937/47056