Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching

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Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching

Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here...

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Bibliographic Details
Main Authors:	Ting, Huey Tze, El-Hossein, Khaled, Chua, Han
Format:	Journal Article
Published:	Trans Tech Publications 2010
Subjects:	Machinable Glass Ceramic Design of Experiment Chemical Etching
Online Access:	http://hdl.handle.net/20.500.11937/40813

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