Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching
Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Trans Tech Publications
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/20.500.11937/40813 |