Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching
Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here...
| Main Authors: | , , |
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| Format: | Journal Article |
| Published: |
Trans Tech Publications
2010
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| Online Access: | http://hdl.handle.net/20.500.11937/40813 |
| _version_ | 1848755971648651264 |
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| author | Ting, Huey Tze El-Hossein, Khaled Chua, Han |
| author_facet | Ting, Huey Tze El-Hossein, Khaled Chua, Han |
| author_sort | Ting, Huey Tze |
| building | Curtin Institutional Repository |
| collection | Online Access |
| description | Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here is the type of chemical etchant used: hydrochloric (HCl), hydrophosphoric (H3PO4) and hydrobromic (HBr) acids; and, numerical parameters are etching temperature and etching solution. The experimental investigation that was carried out is governed by design of experiment (DoE). |
| first_indexed | 2025-11-14T09:04:47Z |
| format | Journal Article |
| id | curtin-20.500.11937-40813 |
| institution | Curtin University Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-14T09:04:47Z |
| publishDate | 2010 |
| publisher | Trans Tech Publications |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | curtin-20.500.11937-408132018-09-06T01:42:35Z Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching Ting, Huey Tze El-Hossein, Khaled Chua, Han Machinable Glass Ceramic Design of Experiment Chemical Etching Machinable glass ceramic (MGC) is well known in the micro-electromechanical system and semiconductor industry. Chemical etching is used in this experiment to study the performance of MGC. The etching rate of MGC and its accuracy by indentation method is studied. The categoric parameter applied here is the type of chemical etchant used: hydrochloric (HCl), hydrophosphoric (H3PO4) and hydrobromic (HBr) acids; and, numerical parameters are etching temperature and etching solution. The experimental investigation that was carried out is governed by design of experiment (DoE). 2010 Journal Article http://hdl.handle.net/20.500.11937/40813 Trans Tech Publications fulltext |
| spellingShingle | Machinable Glass Ceramic Design of Experiment Chemical Etching Ting, Huey Tze El-Hossein, Khaled Chua, Han Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title | Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title_full | Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title_fullStr | Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title_full_unstemmed | Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title_short | Etch Rate and Dimensional Accuracy of Machinable Glass Ceramics in Chemical Etching |
| title_sort | etch rate and dimensional accuracy of machinable glass ceramics in chemical etching |
| topic | Machinable Glass Ceramic Design of Experiment Chemical Etching |
| url | http://hdl.handle.net/20.500.11937/40813 |