Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films

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Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films

Carbon and carbon nitride films (CN x , 0 ≤ x ≤ 0.26) were deposited by filtered pulsed cathodic arc and were investigated using transmission electron microscopy and X-ray photoelectron spectroscopy. A “fullerene-like” (FL) structure of ordered graphitic planes, similar to that of magnetron sputtere...

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Bibliographic Details
Main Authors:	Tucker, Mark, Czigany, Z., Broitman, E., Naslund, L., Hultman, L., Rosen, J.
Format:	Journal Article
Published:	American Institute of Physics 2014
Online Access:	http://hdl.handle.net/20.500.11937/39481

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