Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films
Carbon and carbon nitride films (CN x , 0 ≤ x ≤ 0.26) were deposited by filtered pulsed cathodic arc and were investigated using transmission electron microscopy and X-ray photoelectron spectroscopy. A “fullerene-like” (FL) structure of ordered graphitic planes, similar to that of magnetron sputtere...
| Main Authors: | , , , , , |
|---|---|
| Format: | Journal Article |
| Published: |
American Institute of Physics
2014
|
| Online Access: | http://hdl.handle.net/20.500.11937/39481 |