Fabrication of Nanopore Array Electrodes by Focused Ion Beam Milling

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Fabrication of Nanopore Array Electrodes by Focused Ion Beam Milling

Single nanopore electrodes and nanopore electrode arrays have been fabricated using a focused ion beam (FIB) method. High aspect ratio pores (150-400-nm diameter and 500-nm depth) were fabricated using direct-write local ion milling of a silicon nitride layer over a buried platinum electrode. This l...

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Bibliographic Details
Main Authors:	Lanyon, Y., De Marzi, G., Watson, Y., Quinn, A., Gleeson, J., Redmond, G., Arrigan, Damien
Format:	Journal Article
Published:	American Chemical Society 2007
Online Access:	http://hdl.handle.net/20.500.11937/39372

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